MIAYKE Koji's Homepage

AIST
Research Topics

Nanoindentation using AFM

Characteristics
  • Precise control of normal load from nN to uN
  • Indents can observe using AFM
Application -Mechanical property of glassy polymer thin film-
 Polystylene (PS) was used as a model of glassy polymer.

 Figure shows the modulus of PS films evaluated using AFM indentation. Thickness of PS films were approximately 150 um (Thick film; △, □) and 55 nm (thin film; ▲, ■).
Pyramidal diamond tip (△, ▲) and spherical Rh-coated silicon nitride tip (□, ■) were used.



Figure Modules of PS film

References

  1. "Elastic Modulus of Polystyrene Film from Near-Surface to Bulk Measured by Nanoindentation Using Atomic Force Microscopy"
    K. Miyake, N. Satomi, and S. Sasaki
    Applied Physics Letters 89(3), 031925 (2006).

  2. "The Effect of Pile-up and Contact Area on Hardness Test by Nanoindentation"
    K. Miyake, S. Fujisawa, A. Korenaga, T. Ishida, and S. Sasaki
    Japanese Journal of Applied Physics 43(7B), 4602-4605 (2004).

  3. "ナノインデンテーション法による薄膜材料の機械的特性評価"
    "Evaluation of Mechanical Properties of Thin-film Materials Using Nanoindentation"
    三宅 晃司,佐々木信也
    Koji Miyake and Shinya Sasaki
    応用物理 79(4), 341-345 (2010).
    OYO BUTURI 79(4), 341-345 (2010). [in Japanese]

  4. "ナノインデンテーション"
    "Nanoindentation"
    三宅晃司、元田智弘、佐々木信也
    Koji Miyake, Tomohiro Motoda, and Shinya Sasaki
    トライボロジスト 51(7), 518-523 (2006).
    Journal of Japanese Society of Tribologists 51(7), 518-523 (2006). [in Japanese]