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Reticle: SpinPhoton 10



It is for fabrication of the spin photon memory

The field 1 (Marks) is used for magneto-transport and nano waveguides.



positive resist + lift-off.

or negative resist + Ar milling is also possible.

Top electrodes & back electrodes

negative resist + lift-off.


Technology flow

The fabrication technology is also described here.

Example 1 (basic)


starting film: i-GaAs(sub) :p-GaAs (30 nm):i-GaAs: n:GaAs:nn-InGaAs: Fe(3 nm):Ta(2 nm):Ru (2 nm)

Step 1.(EB alignment marks)

Field 1 (Marks) (positive resist)-> sputtering (Cr (5 nm) +Au (70 nm)+Cr(10 nm))-> lift-off

alternative for better EB alignment but harder etching time adjustment: sputtering (Cr (5 nm) +Au (70 nm)+Cr(10 nm)-> Field 1 (Marks)(negative resist)-> Ar milling until Ru

Step 2.(nanomagnets)

EB nanomagnets (negative EB resist) -> Ar etching (till InGaAs ) ( the etching time is critically important)-> SiO2 sputtering (55 nm) -> lift-off

Step 3 (nanoelectrodes).

EB nanoelectrodes (positive EB resist) -> sputtering Cr (5 nm) +Au (30 nm) -> lift-off

Step 4. top electrodes

Field 2 (top electrodes) (negative resist)-> sputtering (Cr (5 nm) + Au 200 nm) -> lift-off

Step 5. back electrodes

Field 3 (back electrodes) (negative resist)->SiO2 wet etch (diluted BHF)-> GaAs wet etching ( until p-GaAs)->sputtering (Cr (5 nm) + Au 200 nm) -> lift-off



All fields

download gds file of all fields:AllFields.gds

download zip file of all fields for Lazi:Reticle 10

I recomend the use Lasi to check and design a reticle. It is very simple and powerful software. It is also free software. Download it here

How to use Lasi. Simple tips. Click here to expand.

How to use Lasi

1. Download Lazi software from here. Install it in some directory (for example C:\Lasi7)

2. Unzip reticle in some directory (for example C:\reticles\reticle11\)

3. Right click the shortcut 1 field marks. In "taget" input your Lazi directory (for example C:\Lasi\lazi.exe). In "start in" input name of field 1 folder (for example "C:\reticles\reticle11\ 1 field marks")

4. left click on this shortcut. Lasi will open field 1.

5. Choose cell your want to see by pushing "load" or "list"

6. You can use fit (to see all cell) or zoom functions


How to make your first reticle

1) make folder with name of your field and shortcut

2) push load and input new name of your cell. For example, "waveguide". If it is simplest cell use rank 1.

3) Choose your layer (if you do not have, create one in Cnfg (Menu 2)).

4) choose your object. For rank 1 you have two options: Box or Poly/Path.

5) For example choose Box.

6) In cmd type add 20,1,-20, -1 and you have waveguide

Next you can have waveguide with plasmon

7) Push "load". Name new layer "Plasmons". Use rank 2

8) Push Obj, choose "waveguide" (in a cell of rank 2, you can use all cells of rank 1)

9) Cmd, add 0,0. add 0, -5. And you have two waveguides

10) In Layer, choose another layer, which will be transperent.

11) Push Obj, choose Box. Push Cmd, add -1,1,1,-1. And you have a cut in one waveguide










Field 1 EB marks

download gds file: Field1.gds


Field 2 Top electrodes

download gds file: Field2.gds


Field 3 back electrodes

download gds file: Field3.gds


Field 4 Capacitor

download gds file: Field4.gds


Field 5 Resistor

download gds file: Field5.gds



















































I truly appreciate your comments, feedbacks and questions

I will try to answer your questions as soon as possible


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