|Welcome to Shiro Hara's research web site on|
Environmental technology for fabrication, necessary to practice applying nanotechnology for products.
Hyper-mini processing system
overwhelming cleanliness of LSI fab.
| Research Topics|
Hyper-Mini Processing System
Schottky barrier issue
Surface of Silicon Carbide
|Setup & tools|
Contact with questions or comments regarding this site.
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|About the Site Design|
|Since July 15 '03|
|Last updated: Aug 9, 2015.||©2005 S. Hara, AIST|