Japanese
S. Hara's Personal WEB
Welcome to Shiro Hara's research web site on
Environmental technology for fabrication, necessary to practice applying nanotechnology for products.



¶ Research Policy A photo of hyper-mini processing system
Hyper-mini processing system
overwhelming cleanliness of LSI fab.
¶ Research Topics
¶ Hyper-Mini Processing System
¶ Schottky barrier issue
¶ Surface of Silicon Carbide
¶ Papers
¶ Setup & tools
¶ Profile
¶ Contact

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About the Site Design
Since July 15 '03
Last updated: Aug 9, 2015. ©2005 S. Hara, AIST