Doctoral dissertation
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Last update: 2002/11/06

　

Master thesis
Doctoral dissertation
BOD sensor
Micro oxygen sensor
Paper-based oxygen sensor
Micro degasser
Micromixer
Flow rate
Dynamic Measuring Method
Fluidic MEMS packaging
Smooth Etching of Si
Standing Wave valve
IR aligner
World-to-chip Socket
Microfluidic socket 2
Socket2_English
PZT Spray Coating

　

　

Table of contents

Introduction

Fig. 1-2,   Fig. 1-3,   Fig. 1-4, Fig. 1-5,  Fig. 1-6,  Fig. 1-7,  Fig.  1-8,  Fig. 1-9,  Fig. 1-10

You can order the dissertation from National Diet Library, Order ID: UT51-99-U127