2001.12.21より
名の来訪者がありました.
2004年3月31日に任期満了と伴い、東京都立産業技術研究所へ移ります。 この度お世話になりました。

I work for AIST
from 1998 to 2004.
Email: Zhen.YANG@aist.go.jp

更新履歴(From 2007-11-8)
2007-11-08
Reversion history recorded at this top page
Powerpoint file in PDF format is available for ammonia etching under
publication2
2008-08-28
A renew version of ammonia etching
is uploaded under the same page above.
2008-09-12
I gave a talk about the next generation micromachine, MEMS2.0, at Yayoi Kodou,
on Sept. 12th, 2008
2009-01-06
The titles of my bookshelf, PDF files of the
panels at Micromachine/MEMS 2008 and the PDF files of the
panels at Semicon Japan 2008 have been added.
2009-03-09
The PDF file of my presentation at Ota-ku
Sangyo Palaza, Feb. 27th, 2009 has been added.